6/7/2011	8:48:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/7/2011	8:48:03 AM	Recipe started at 8:48 AM
6/7/2011	8:48:03 AM	H2 valve closed
6/7/2011	8:48:03 AM	BCl3 valve closed
6/7/2011	8:48:03 AM	PH3 valve closed
6/7/2011	8:48:03 AM	SiCl4 pre valve closed
6/7/2011	8:48:03 AM	SiCl4 post valve closed
6/7/2011	8:48:03 AM	Main Vac valve closed
6/7/2011	8:48:03 AM	Bypass valve closed
6/7/2011	8:48:03 AM	Bubbler valve closed
6/7/2011	8:48:03 AM	Helium valve opened
6/7/2011	8:48:03 AM	Helium MFC set to  500.000000
6/7/2011	8:48:03 AM	H2 MFC set to  0.000000
6/7/2011	8:48:03 AM	BCl3 MFC set to  0.000000
6/7/2011	8:48:03 AM	PHl3 MFC set to  0.000000
6/7/2011	8:48:03 AM	SiCl4 MFC set to  0.000000
6/7/2011	8:48:03 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	8:48:04 AM	Tube furnace set to 0
6/7/2011	8:49:25 AM	Helium valve closed
6/7/2011	8:49:25 AM	H2 valve closed
6/7/2011	8:49:25 AM	BCl3 valve closed
6/7/2011	8:49:25 AM	PH3 valve closed
6/7/2011	8:49:25 AM	SiCl4 pre valve closed
6/7/2011	8:49:25 AM	SiCl4 post valve closed
6/7/2011	8:49:25 AM	Main Vac valve closed
6/7/2011	8:49:25 AM	Bypass valve closed
6/7/2011	8:49:25 AM	Bubbler valve closed
6/7/2011	8:49:25 AM	Helium MFC set to  0.000000
6/7/2011	8:49:25 AM	H2 MFC set to  0.000000
6/7/2011	8:49:25 AM	BCl3 MFC set to  0.000000
6/7/2011	8:49:25 AM	PHl3 MFC set to  0.000000
6/7/2011	8:49:25 AM	SiCl4 MFC set to  0.000000
6/7/2011	8:49:25 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	8:49:25 AM	Tube furnace set to 0
6/7/2011	8:49:25 AM	Run finished at 8:49 AM
6/7/2011	8:49:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/7/2011	8:57:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/7/2011	8:57:56 AM	Recipe started at 8:57 AM
6/7/2011	8:57:56 AM	Helium valve closed
6/7/2011	8:57:56 AM	H2 valve closed
6/7/2011	8:57:56 AM	BCl3 valve closed
6/7/2011	8:57:56 AM	PH3 valve closed
6/7/2011	8:57:56 AM	SiCl4 pre valve closed
6/7/2011	8:57:56 AM	SiCl4 post valve closed
6/7/2011	8:57:56 AM	Main Vac valve closed
6/7/2011	8:57:56 AM	Bubbler valve closed
6/7/2011	8:57:56 AM	Bypass valve opened
6/7/2011	8:57:56 AM	Helium MFC set to  0.000000
6/7/2011	8:57:56 AM	H2 MFC set to  0.000000
6/7/2011	8:57:56 AM	BCl3 MFC set to  0.000000
6/7/2011	8:57:56 AM	PHl3 MFC set to  0.000000
6/7/2011	8:57:56 AM	SiCl4 MFC set to  0.000000
6/7/2011	8:57:56 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	8:57:56 AM	Tube furnace set to 0
6/7/2011	8:58:29 AM	Helium valve closed
6/7/2011	8:58:29 AM	H2 valve closed
6/7/2011	8:58:29 AM	BCl3 valve closed
6/7/2011	8:58:29 AM	PH3 valve closed
6/7/2011	8:58:29 AM	SiCl4 pre valve closed
6/7/2011	8:58:29 AM	SiCl4 post valve closed
6/7/2011	8:58:29 AM	Bubbler valve closed
6/7/2011	8:58:29 AM	Main Vac valve opened
6/7/2011	8:58:29 AM	Bypass valve opened
6/7/2011	8:58:29 AM	Helium MFC set to  0.000000
6/7/2011	8:58:29 AM	H2 MFC set to  0.000000
6/7/2011	8:58:29 AM	BCl3 MFC set to  0.000000
6/7/2011	8:58:29 AM	PHl3 MFC set to  0.000000
6/7/2011	8:58:29 AM	SiCl4 MFC set to  0.000000
6/7/2011	8:58:29 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	8:58:29 AM	Tube furnace set to 0
6/7/2011	8:59:29 AM	H2 valve closed
6/7/2011	8:59:29 AM	BCl3 valve closed
6/7/2011	8:59:29 AM	PH3 valve closed
6/7/2011	8:59:29 AM	SiCl4 pre valve closed
6/7/2011	8:59:29 AM	SiCl4 post valve closed
6/7/2011	8:59:29 AM	Bubbler valve closed
6/7/2011	8:59:29 AM	Helium valve opened
6/7/2011	8:59:29 AM	Main Vac valve opened
6/7/2011	8:59:29 AM	Bypass valve opened
6/7/2011	8:59:29 AM	Helium MFC set to  100.000000
6/7/2011	8:59:29 AM	H2 MFC set to  0.000000
6/7/2011	8:59:29 AM	BCl3 MFC set to  0.000000
6/7/2011	8:59:29 AM	PHl3 MFC set to  0.000000
6/7/2011	8:59:29 AM	SiCl4 MFC set to  0.000000
6/7/2011	8:59:29 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	8:59:30 AM	Tube furnace set to 0
6/7/2011	9:00:30 AM	Helium valve closed
6/7/2011	9:00:30 AM	H2 valve closed
6/7/2011	9:00:30 AM	BCl3 valve closed
6/7/2011	9:00:30 AM	PH3 valve closed
6/7/2011	9:00:30 AM	SiCl4 pre valve closed
6/7/2011	9:00:30 AM	SiCl4 post valve closed
6/7/2011	9:00:30 AM	Bubbler valve closed
6/7/2011	9:00:30 AM	Main Vac valve opened
6/7/2011	9:00:30 AM	Bypass valve opened
6/7/2011	9:00:30 AM	Helium MFC set to  0.000000
6/7/2011	9:00:30 AM	H2 MFC set to  0.000000
6/7/2011	9:00:30 AM	BCl3 MFC set to  0.000000
6/7/2011	9:00:30 AM	PHl3 MFC set to  0.000000
6/7/2011	9:00:30 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:00:30 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:00:30 AM	Tube furnace set to 0
6/7/2011	9:01:30 AM	H2 valve closed
6/7/2011	9:01:30 AM	BCl3 valve closed
6/7/2011	9:01:30 AM	PH3 valve closed
6/7/2011	9:01:30 AM	SiCl4 pre valve closed
6/7/2011	9:01:30 AM	SiCl4 post valve closed
6/7/2011	9:01:30 AM	Bubbler valve closed
6/7/2011	9:01:30 AM	Helium valve opened
6/7/2011	9:01:30 AM	Main Vac valve opened
6/7/2011	9:01:30 AM	Bypass valve opened
6/7/2011	9:01:30 AM	Helium MFC set to  100.000000
6/7/2011	9:01:30 AM	H2 MFC set to  0.000000
6/7/2011	9:01:30 AM	BCl3 MFC set to  0.000000
6/7/2011	9:01:30 AM	PHl3 MFC set to  0.000000
6/7/2011	9:01:30 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:01:30 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:01:30 AM	Tube furnace set to 0
6/7/2011	9:02:30 AM	Helium valve closed
6/7/2011	9:02:30 AM	H2 valve closed
6/7/2011	9:02:30 AM	BCl3 valve closed
6/7/2011	9:02:30 AM	PH3 valve closed
6/7/2011	9:02:30 AM	SiCl4 pre valve closed
6/7/2011	9:02:30 AM	SiCl4 post valve closed
6/7/2011	9:02:30 AM	Bubbler valve closed
6/7/2011	9:02:30 AM	Main Vac valve opened
6/7/2011	9:02:30 AM	Bypass valve opened
6/7/2011	9:02:30 AM	Helium MFC set to  0.000000
6/7/2011	9:02:30 AM	H2 MFC set to  0.000000
6/7/2011	9:02:30 AM	BCl3 MFC set to  0.000000
6/7/2011	9:02:30 AM	PHl3 MFC set to  0.000000
6/7/2011	9:02:30 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:02:30 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:02:30 AM	Tube furnace set to 0
6/7/2011	9:03:30 AM	H2 valve closed
6/7/2011	9:03:30 AM	BCl3 valve closed
6/7/2011	9:03:30 AM	PH3 valve closed
6/7/2011	9:03:30 AM	SiCl4 pre valve closed
6/7/2011	9:03:30 AM	SiCl4 post valve closed
6/7/2011	9:03:30 AM	Bubbler valve closed
6/7/2011	9:03:30 AM	Helium valve opened
6/7/2011	9:03:30 AM	Main Vac valve opened
6/7/2011	9:03:30 AM	Bypass valve opened
6/7/2011	9:03:30 AM	Helium MFC set to  100.000000
6/7/2011	9:03:30 AM	H2 MFC set to  0.000000
6/7/2011	9:03:30 AM	BCl3 MFC set to  0.000000
6/7/2011	9:03:30 AM	PHl3 MFC set to  0.000000
6/7/2011	9:03:30 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:03:30 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:03:30 AM	Tube furnace set to 0
6/7/2011	9:04:30 AM	Helium valve closed
6/7/2011	9:04:30 AM	H2 valve closed
6/7/2011	9:04:30 AM	BCl3 valve closed
6/7/2011	9:04:30 AM	PH3 valve closed
6/7/2011	9:04:30 AM	SiCl4 pre valve closed
6/7/2011	9:04:30 AM	SiCl4 post valve closed
6/7/2011	9:04:30 AM	Bubbler valve closed
6/7/2011	9:04:30 AM	Main Vac valve opened
6/7/2011	9:04:30 AM	Bypass valve opened
6/7/2011	9:04:30 AM	Helium MFC set to  0.000000
6/7/2011	9:04:30 AM	H2 MFC set to  0.000000
6/7/2011	9:04:30 AM	BCl3 MFC set to  0.000000
6/7/2011	9:04:30 AM	PHl3 MFC set to  0.000000
6/7/2011	9:04:30 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:04:30 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:04:31 AM	Tube furnace set to 0
6/7/2011	9:05:31 AM	H2 valve closed
6/7/2011	9:05:31 AM	BCl3 valve closed
6/7/2011	9:05:31 AM	PH3 valve closed
6/7/2011	9:05:31 AM	SiCl4 pre valve closed
6/7/2011	9:05:31 AM	SiCl4 post valve closed
6/7/2011	9:05:31 AM	Bubbler valve closed
6/7/2011	9:05:31 AM	Helium valve opened
6/7/2011	9:05:31 AM	Main Vac valve opened
6/7/2011	9:05:31 AM	Bypass valve opened
6/7/2011	9:05:31 AM	Helium MFC set to  100.000000
6/7/2011	9:05:31 AM	H2 MFC set to  0.000000
6/7/2011	9:05:31 AM	BCl3 MFC set to  0.000000
6/7/2011	9:05:31 AM	PHl3 MFC set to  0.000000
6/7/2011	9:05:31 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:05:31 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:05:31 AM	Tube furnace set to 0
6/7/2011	9:06:31 AM	Helium valve closed
6/7/2011	9:06:31 AM	H2 valve closed
6/7/2011	9:06:31 AM	BCl3 valve closed
6/7/2011	9:06:31 AM	PH3 valve closed
6/7/2011	9:06:31 AM	SiCl4 pre valve closed
6/7/2011	9:06:31 AM	SiCl4 post valve closed
6/7/2011	9:06:31 AM	Bubbler valve closed
6/7/2011	9:06:31 AM	Main Vac valve opened
6/7/2011	9:06:31 AM	Bypass valve opened
6/7/2011	9:06:31 AM	Helium MFC set to  0.000000
6/7/2011	9:06:31 AM	H2 MFC set to  0.000000
6/7/2011	9:06:31 AM	BCl3 MFC set to  0.000000
6/7/2011	9:06:31 AM	PHl3 MFC set to  0.000000
6/7/2011	9:06:31 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:06:31 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:06:31 AM	Tube furnace set to 0
6/7/2011	9:07:31 AM	H2 valve closed
6/7/2011	9:07:31 AM	BCl3 valve closed
6/7/2011	9:07:31 AM	PH3 valve closed
6/7/2011	9:07:31 AM	SiCl4 pre valve closed
6/7/2011	9:07:31 AM	SiCl4 post valve closed
6/7/2011	9:07:31 AM	Bubbler valve closed
6/7/2011	9:07:31 AM	Helium valve opened
6/7/2011	9:07:31 AM	Main Vac valve opened
6/7/2011	9:07:31 AM	Bypass valve opened
6/7/2011	9:07:31 AM	Helium MFC set to  100.000000
6/7/2011	9:07:31 AM	H2 MFC set to  0.000000
6/7/2011	9:07:31 AM	BCl3 MFC set to  0.000000
6/7/2011	9:07:31 AM	PHl3 MFC set to  0.000000
6/7/2011	9:07:31 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:07:31 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:07:31 AM	Tube furnace set to 0
6/7/2011	9:08:31 AM	Helium valve closed
6/7/2011	9:08:31 AM	H2 valve closed
6/7/2011	9:08:31 AM	BCl3 valve closed
6/7/2011	9:08:31 AM	PH3 valve closed
6/7/2011	9:08:31 AM	SiCl4 pre valve closed
6/7/2011	9:08:31 AM	SiCl4 post valve closed
6/7/2011	9:08:31 AM	Bubbler valve closed
6/7/2011	9:08:31 AM	Main Vac valve opened
6/7/2011	9:08:31 AM	Bypass valve opened
6/7/2011	9:08:31 AM	Helium MFC set to  0.000000
6/7/2011	9:08:31 AM	H2 MFC set to  0.000000
6/7/2011	9:08:31 AM	BCl3 MFC set to  0.000000
6/7/2011	9:08:31 AM	PHl3 MFC set to  0.000000
6/7/2011	9:08:31 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:08:31 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:08:31 AM	Tube furnace set to 0
6/7/2011	9:09:31 AM	H2 valve closed
6/7/2011	9:09:31 AM	BCl3 valve closed
6/7/2011	9:09:31 AM	PH3 valve closed
6/7/2011	9:09:31 AM	SiCl4 pre valve closed
6/7/2011	9:09:31 AM	SiCl4 post valve closed
6/7/2011	9:09:31 AM	Bubbler valve closed
6/7/2011	9:09:31 AM	Helium valve opened
6/7/2011	9:09:31 AM	Main Vac valve opened
6/7/2011	9:09:31 AM	Bypass valve opened
6/7/2011	9:09:31 AM	Helium MFC set to  100.000000
6/7/2011	9:09:31 AM	H2 MFC set to  0.000000
6/7/2011	9:09:31 AM	BCl3 MFC set to  0.000000
6/7/2011	9:09:31 AM	PHl3 MFC set to  0.000000
6/7/2011	9:09:31 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:09:31 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:09:32 AM	Tube furnace set to 0
6/7/2011	9:10:32 AM	Helium valve closed
6/7/2011	9:10:32 AM	H2 valve closed
6/7/2011	9:10:32 AM	BCl3 valve closed
6/7/2011	9:10:32 AM	PH3 valve closed
6/7/2011	9:10:32 AM	SiCl4 pre valve closed
6/7/2011	9:10:32 AM	SiCl4 post valve closed
6/7/2011	9:10:32 AM	Bubbler valve closed
6/7/2011	9:10:32 AM	Main Vac valve opened
6/7/2011	9:10:32 AM	Bypass valve opened
6/7/2011	9:10:32 AM	Helium MFC set to  0.000000
6/7/2011	9:10:32 AM	H2 MFC set to  0.000000
6/7/2011	9:10:32 AM	BCl3 MFC set to  0.000000
6/7/2011	9:10:32 AM	PHl3 MFC set to  0.000000
6/7/2011	9:10:32 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:10:32 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:10:32 AM	Tube furnace set to 0
6/7/2011	9:11:32 AM	H2 valve closed
6/7/2011	9:11:32 AM	BCl3 valve closed
6/7/2011	9:11:32 AM	PH3 valve closed
6/7/2011	9:11:32 AM	SiCl4 pre valve closed
6/7/2011	9:11:32 AM	SiCl4 post valve closed
6/7/2011	9:11:32 AM	Bubbler valve closed
6/7/2011	9:11:32 AM	Helium valve opened
6/7/2011	9:11:32 AM	Main Vac valve opened
6/7/2011	9:11:32 AM	Bypass valve opened
6/7/2011	9:11:32 AM	Helium MFC set to  100.000000
6/7/2011	9:11:32 AM	H2 MFC set to  0.000000
6/7/2011	9:11:32 AM	BCl3 MFC set to  0.000000
6/7/2011	9:11:32 AM	PHl3 MFC set to  0.000000
6/7/2011	9:11:32 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:11:32 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:11:32 AM	Tube furnace set to 0
6/7/2011	9:12:32 AM	Helium valve closed
6/7/2011	9:12:32 AM	H2 valve closed
6/7/2011	9:12:32 AM	BCl3 valve closed
6/7/2011	9:12:32 AM	PH3 valve closed
6/7/2011	9:12:32 AM	SiCl4 pre valve closed
6/7/2011	9:12:32 AM	SiCl4 post valve closed
6/7/2011	9:12:32 AM	Bubbler valve closed
6/7/2011	9:12:32 AM	Main Vac valve opened
6/7/2011	9:12:32 AM	Bypass valve opened
6/7/2011	9:12:32 AM	Helium MFC set to  0.000000
6/7/2011	9:12:32 AM	H2 MFC set to  0.000000
6/7/2011	9:12:32 AM	BCl3 MFC set to  0.000000
6/7/2011	9:12:32 AM	PHl3 MFC set to  0.000000
6/7/2011	9:12:32 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:12:32 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:12:32 AM	Tube furnace set to 0
6/7/2011	9:13:32 AM	H2 valve closed
6/7/2011	9:13:32 AM	BCl3 valve closed
6/7/2011	9:13:32 AM	PH3 valve closed
6/7/2011	9:13:32 AM	SiCl4 pre valve closed
6/7/2011	9:13:32 AM	SiCl4 post valve closed
6/7/2011	9:13:32 AM	Bubbler valve closed
6/7/2011	9:13:32 AM	Helium valve opened
6/7/2011	9:13:32 AM	Main Vac valve opened
6/7/2011	9:13:32 AM	Bypass valve opened
6/7/2011	9:13:32 AM	Helium MFC set to  100.000000
6/7/2011	9:13:32 AM	H2 MFC set to  0.000000
6/7/2011	9:13:32 AM	BCl3 MFC set to  0.000000
6/7/2011	9:13:32 AM	PHl3 MFC set to  0.000000
6/7/2011	9:13:32 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:13:32 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:13:32 AM	Tube furnace set to 0
6/7/2011	9:14:32 AM	Helium valve closed
6/7/2011	9:14:32 AM	H2 valve closed
6/7/2011	9:14:32 AM	BCl3 valve closed
6/7/2011	9:14:32 AM	PH3 valve closed
6/7/2011	9:14:32 AM	SiCl4 pre valve closed
6/7/2011	9:14:32 AM	SiCl4 post valve closed
6/7/2011	9:14:32 AM	Bubbler valve closed
6/7/2011	9:14:32 AM	Main Vac valve opened
6/7/2011	9:14:32 AM	Bypass valve opened
6/7/2011	9:14:32 AM	Helium MFC set to  0.000000
6/7/2011	9:14:32 AM	H2 MFC set to  0.000000
6/7/2011	9:14:32 AM	BCl3 MFC set to  0.000000
6/7/2011	9:14:32 AM	PHl3 MFC set to  0.000000
6/7/2011	9:14:32 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:14:32 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:14:33 AM	Tube furnace set to 0
6/7/2011	9:15:33 AM	H2 valve closed
6/7/2011	9:15:33 AM	BCl3 valve closed
6/7/2011	9:15:33 AM	PH3 valve closed
6/7/2011	9:15:33 AM	SiCl4 pre valve closed
6/7/2011	9:15:33 AM	SiCl4 post valve closed
6/7/2011	9:15:33 AM	Bubbler valve closed
6/7/2011	9:15:33 AM	Helium valve opened
6/7/2011	9:15:33 AM	Main Vac valve opened
6/7/2011	9:15:33 AM	Bypass valve opened
6/7/2011	9:15:33 AM	Helium MFC set to  100.000000
6/7/2011	9:15:33 AM	H2 MFC set to  0.000000
6/7/2011	9:15:33 AM	BCl3 MFC set to  0.000000
6/7/2011	9:15:33 AM	PHl3 MFC set to  0.000000
6/7/2011	9:15:33 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:15:33 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:15:33 AM	Tube furnace set to 0
6/7/2011	9:16:33 AM	Helium valve closed
6/7/2011	9:16:33 AM	H2 valve closed
6/7/2011	9:16:33 AM	BCl3 valve closed
6/7/2011	9:16:33 AM	PH3 valve closed
6/7/2011	9:16:33 AM	SiCl4 pre valve closed
6/7/2011	9:16:33 AM	SiCl4 post valve closed
6/7/2011	9:16:33 AM	Bubbler valve closed
6/7/2011	9:16:33 AM	Main Vac valve opened
6/7/2011	9:16:33 AM	Bypass valve opened
6/7/2011	9:16:33 AM	Helium MFC set to  0.000000
6/7/2011	9:16:33 AM	H2 MFC set to  0.000000
6/7/2011	9:16:33 AM	BCl3 MFC set to  0.000000
6/7/2011	9:16:33 AM	PHl3 MFC set to  0.000000
6/7/2011	9:16:33 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:16:33 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:16:33 AM	Tube furnace set to 0
6/7/2011	9:17:33 AM	H2 valve closed
6/7/2011	9:17:33 AM	BCl3 valve closed
6/7/2011	9:17:33 AM	PH3 valve closed
6/7/2011	9:17:33 AM	SiCl4 pre valve closed
6/7/2011	9:17:33 AM	SiCl4 post valve closed
6/7/2011	9:17:33 AM	Bubbler valve closed
6/7/2011	9:17:33 AM	Helium valve opened
6/7/2011	9:17:33 AM	Main Vac valve opened
6/7/2011	9:17:33 AM	Bypass valve opened
6/7/2011	9:17:33 AM	Helium MFC set to  100.000000
6/7/2011	9:17:33 AM	H2 MFC set to  0.000000
6/7/2011	9:17:33 AM	BCl3 MFC set to  0.000000
6/7/2011	9:17:33 AM	PHl3 MFC set to  0.000000
6/7/2011	9:17:33 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:17:33 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:17:33 AM	Tube furnace set to 0
6/7/2011	9:18:33 AM	Helium valve closed
6/7/2011	9:18:33 AM	H2 valve closed
6/7/2011	9:18:33 AM	BCl3 valve closed
6/7/2011	9:18:33 AM	PH3 valve closed
6/7/2011	9:18:33 AM	SiCl4 pre valve closed
6/7/2011	9:18:33 AM	SiCl4 post valve closed
6/7/2011	9:18:33 AM	Bubbler valve closed
6/7/2011	9:18:33 AM	Main Vac valve opened
6/7/2011	9:18:33 AM	Bypass valve opened
6/7/2011	9:18:33 AM	Helium MFC set to  0.000000
6/7/2011	9:18:33 AM	H2 MFC set to  0.000000
6/7/2011	9:18:33 AM	BCl3 MFC set to  0.000000
6/7/2011	9:18:33 AM	PHl3 MFC set to  0.000000
6/7/2011	9:18:33 AM	SiCl4 MFC set to  0.000000
6/7/2011	9:18:33 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	9:18:33 AM	Tube furnace set to 0
6/7/2011	9:18:34 AM	Run finished at 9:18 AM
6/7/2011	9:18:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/7/2011	10:37:17 AM	Helium MFC set to  100.000000
6/7/2011	10:37:20 AM	Helium valve opened
6/7/2011	10:38:02 AM	Helium valve closed
6/7/2011	10:39:50 AM	Recipe started at 10:39 AM
6/7/2011	10:39:50 AM	Helium valve closed
6/7/2011	10:39:50 AM	BCl3 valve closed
6/7/2011	10:39:50 AM	PH3 valve closed
6/7/2011	10:39:50 AM	SiCl4 pre valve closed
6/7/2011	10:39:50 AM	SiCl4 post valve closed
6/7/2011	10:39:50 AM	Main Vac valve closed
6/7/2011	10:39:50 AM	Bypass valve closed
6/7/2011	10:39:50 AM	Bubbler valve closed
6/7/2011	10:39:50 AM	H2 valve opened
6/7/2011	10:39:50 AM	Helium MFC set to  0.000000
6/7/2011	10:39:50 AM	H2 MFC set to  500.000000
6/7/2011	10:39:50 AM	BCl3 MFC set to  0.000000
6/7/2011	10:39:50 AM	PHl3 MFC set to  0.000000
6/7/2011	10:39:50 AM	SiCl4 MFC set to  0.000000
6/7/2011	10:39:50 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	10:39:50 AM	Tube furnace set to 0
6/7/2011	10:41:14 AM	Helium valve closed
6/7/2011	10:41:14 AM	BCl3 valve closed
6/7/2011	10:41:14 AM	PH3 valve closed
6/7/2011	10:41:14 AM	SiCl4 pre valve closed
6/7/2011	10:41:14 AM	SiCl4 post valve closed
6/7/2011	10:41:14 AM	Main Vac valve closed
6/7/2011	10:41:14 AM	Bypass valve closed
6/7/2011	10:41:14 AM	H2 valve opened
6/7/2011	10:41:14 AM	Bubbler valve opened
6/7/2011	10:41:14 AM	Helium MFC set to  0.000000
6/7/2011	10:41:14 AM	H2 MFC set to  500.000000
6/7/2011	10:41:14 AM	BCl3 MFC set to  0.000000
6/7/2011	10:41:14 AM	PHl3 MFC set to  0.000000
6/7/2011	10:41:14 AM	SiCl4 MFC set to  0.000000
6/7/2011	10:41:14 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	10:41:14 AM	Tube furnace set to 1000
6/7/2011	11:01:14 AM	Helium valve closed
6/7/2011	11:01:14 AM	PH3 valve closed
6/7/2011	11:01:14 AM	Main Vac valve closed
6/7/2011	11:01:14 AM	Bypass valve closed
6/7/2011	11:01:14 AM	H2 valve opened
6/7/2011	11:01:14 AM	BCl3 valve opened
6/7/2011	11:01:14 AM	SiCl4 pre valve opened
6/7/2011	11:01:14 AM	SiCl4 post valve opened
6/7/2011	11:01:14 AM	Bubbler valve opened
6/7/2011	11:01:14 AM	Helium MFC set to  0.000000
6/7/2011	11:01:14 AM	H2 MFC set to  500.000000
6/7/2011	11:01:14 AM	BCl3 MFC set to  3.000000
6/7/2011	11:01:14 AM	PHl3 MFC set to  0.000000
6/7/2011	11:01:14 AM	SiCl4 MFC set to  50.000000
6/7/2011	11:01:14 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	11:01:14 AM	Tube furnace set to 1000
6/7/2011	11:21:14 AM	H2 valve closed
6/7/2011	11:21:14 AM	BCl3 valve closed
6/7/2011	11:21:14 AM	PH3 valve closed
6/7/2011	11:21:14 AM	SiCl4 pre valve closed
6/7/2011	11:21:14 AM	SiCl4 post valve closed
6/7/2011	11:21:14 AM	Main Vac valve closed
6/7/2011	11:21:14 AM	Bypass valve closed
6/7/2011	11:21:14 AM	Helium valve opened
6/7/2011	11:21:14 AM	Bubbler valve opened
6/7/2011	11:21:14 AM	Helium MFC set to  500.000000
6/7/2011	11:21:14 AM	H2 MFC set to  0.000000
6/7/2011	11:21:14 AM	BCl3 MFC set to  0.000000
6/7/2011	11:21:14 AM	PHl3 MFC set to  0.000000
6/7/2011	11:21:14 AM	SiCl4 MFC set to  0.000000
6/7/2011	11:21:14 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	11:21:15 AM	Tube furnace set to 0
6/7/2011	11:41:15 AM	Helium valve closed
6/7/2011	11:41:15 AM	H2 valve closed
6/7/2011	11:41:15 AM	BCl3 valve closed
6/7/2011	11:41:15 AM	PH3 valve closed
6/7/2011	11:41:15 AM	SiCl4 pre valve closed
6/7/2011	11:41:15 AM	SiCl4 post valve closed
6/7/2011	11:41:15 AM	Main Vac valve closed
6/7/2011	11:41:15 AM	Bypass valve closed
6/7/2011	11:41:15 AM	Bubbler valve closed
6/7/2011	11:41:15 AM	Helium MFC set to  0.000000
6/7/2011	11:41:15 AM	H2 MFC set to  0.000000
6/7/2011	11:41:15 AM	BCl3 MFC set to  0.000000
6/7/2011	11:41:15 AM	PHl3 MFC set to  0.000000
6/7/2011	11:41:15 AM	SiCl4 MFC set to  0.000000
6/7/2011	11:41:15 AM	Bypass solenoid MFC set to  0.000000
6/7/2011	11:41:15 AM	Tube furnace set to 0
6/7/2011	11:41:15 AM	Run finished at 11:41 AM
6/7/2011	12:02:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/7/2011	12:03:04 PM	Recipe started at 12:02 PM
6/7/2011	12:03:04 PM	Helium valve closed
6/7/2011	12:03:04 PM	H2 valve closed
6/7/2011	12:03:04 PM	BCl3 valve closed
6/7/2011	12:03:04 PM	PH3 valve closed
6/7/2011	12:03:04 PM	SiCl4 pre valve closed
6/7/2011	12:03:04 PM	SiCl4 post valve closed
6/7/2011	12:03:04 PM	Main Vac valve closed
6/7/2011	12:03:04 PM	Bubbler valve closed
6/7/2011	12:03:04 PM	Bypass valve opened
6/7/2011	12:03:04 PM	Helium MFC set to  0.000000
6/7/2011	12:03:04 PM	H2 MFC set to  0.000000
6/7/2011	12:03:04 PM	BCl3 MFC set to  0.000000
6/7/2011	12:03:04 PM	PHl3 MFC set to  0.000000
6/7/2011	12:03:04 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:03:04 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:03:04 PM	Tube furnace set to 0
6/7/2011	12:03:38 PM	Helium valve closed
6/7/2011	12:03:38 PM	H2 valve closed
6/7/2011	12:03:38 PM	BCl3 valve closed
6/7/2011	12:03:38 PM	PH3 valve closed
6/7/2011	12:03:38 PM	SiCl4 pre valve closed
6/7/2011	12:03:38 PM	SiCl4 post valve closed
6/7/2011	12:03:38 PM	Bubbler valve closed
6/7/2011	12:03:38 PM	Main Vac valve opened
6/7/2011	12:03:38 PM	Bypass valve opened
6/7/2011	12:03:38 PM	Helium MFC set to  0.000000
6/7/2011	12:03:38 PM	H2 MFC set to  0.000000
6/7/2011	12:03:38 PM	BCl3 MFC set to  0.000000
6/7/2011	12:03:38 PM	PHl3 MFC set to  0.000000
6/7/2011	12:03:38 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:03:38 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:03:38 PM	Tube furnace set to 0
6/7/2011	12:04:38 PM	H2 valve closed
6/7/2011	12:04:38 PM	BCl3 valve closed
6/7/2011	12:04:38 PM	PH3 valve closed
6/7/2011	12:04:38 PM	SiCl4 pre valve closed
6/7/2011	12:04:38 PM	SiCl4 post valve closed
6/7/2011	12:04:38 PM	Bubbler valve closed
6/7/2011	12:04:38 PM	Helium valve opened
6/7/2011	12:04:38 PM	Main Vac valve opened
6/7/2011	12:04:38 PM	Bypass valve opened
6/7/2011	12:04:38 PM	Helium MFC set to  100.000000
6/7/2011	12:04:38 PM	H2 MFC set to  0.000000
6/7/2011	12:04:38 PM	BCl3 MFC set to  0.000000
6/7/2011	12:04:38 PM	PHl3 MFC set to  0.000000
6/7/2011	12:04:38 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:04:38 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:04:38 PM	Tube furnace set to 0
6/7/2011	12:05:38 PM	Helium valve closed
6/7/2011	12:05:38 PM	H2 valve closed
6/7/2011	12:05:38 PM	BCl3 valve closed
6/7/2011	12:05:38 PM	PH3 valve closed
6/7/2011	12:05:38 PM	SiCl4 pre valve closed
6/7/2011	12:05:38 PM	SiCl4 post valve closed
6/7/2011	12:05:38 PM	Bubbler valve closed
6/7/2011	12:05:38 PM	Main Vac valve opened
6/7/2011	12:05:38 PM	Bypass valve opened
6/7/2011	12:05:38 PM	Helium MFC set to  0.000000
6/7/2011	12:05:38 PM	H2 MFC set to  0.000000
6/7/2011	12:05:38 PM	BCl3 MFC set to  0.000000
6/7/2011	12:05:38 PM	PHl3 MFC set to  0.000000
6/7/2011	12:05:38 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:05:38 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:05:39 PM	Tube furnace set to 0
6/7/2011	12:06:39 PM	H2 valve closed
6/7/2011	12:06:39 PM	BCl3 valve closed
6/7/2011	12:06:39 PM	PH3 valve closed
6/7/2011	12:06:39 PM	SiCl4 pre valve closed
6/7/2011	12:06:39 PM	SiCl4 post valve closed
6/7/2011	12:06:39 PM	Bubbler valve closed
6/7/2011	12:06:39 PM	Helium valve opened
6/7/2011	12:06:39 PM	Main Vac valve opened
6/7/2011	12:06:39 PM	Bypass valve opened
6/7/2011	12:06:39 PM	Helium MFC set to  100.000000
6/7/2011	12:06:39 PM	H2 MFC set to  0.000000
6/7/2011	12:06:39 PM	BCl3 MFC set to  0.000000
6/7/2011	12:06:39 PM	PHl3 MFC set to  0.000000
6/7/2011	12:06:39 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:06:39 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:06:39 PM	Tube furnace set to 0
6/7/2011	12:07:39 PM	Helium valve closed
6/7/2011	12:07:39 PM	H2 valve closed
6/7/2011	12:07:39 PM	BCl3 valve closed
6/7/2011	12:07:39 PM	PH3 valve closed
6/7/2011	12:07:39 PM	SiCl4 pre valve closed
6/7/2011	12:07:39 PM	SiCl4 post valve closed
6/7/2011	12:07:39 PM	Bubbler valve closed
6/7/2011	12:07:39 PM	Main Vac valve opened
6/7/2011	12:07:39 PM	Bypass valve opened
6/7/2011	12:07:39 PM	Helium MFC set to  0.000000
6/7/2011	12:07:39 PM	H2 MFC set to  0.000000
6/7/2011	12:07:39 PM	BCl3 MFC set to  0.000000
6/7/2011	12:07:39 PM	PHl3 MFC set to  0.000000
6/7/2011	12:07:39 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:07:39 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:07:39 PM	Tube furnace set to 0
6/7/2011	12:08:39 PM	H2 valve closed
6/7/2011	12:08:39 PM	BCl3 valve closed
6/7/2011	12:08:39 PM	PH3 valve closed
6/7/2011	12:08:39 PM	SiCl4 pre valve closed
6/7/2011	12:08:39 PM	SiCl4 post valve closed
6/7/2011	12:08:39 PM	Bubbler valve closed
6/7/2011	12:08:39 PM	Helium valve opened
6/7/2011	12:08:39 PM	Main Vac valve opened
6/7/2011	12:08:39 PM	Bypass valve opened
6/7/2011	12:08:39 PM	Helium MFC set to  100.000000
6/7/2011	12:08:39 PM	H2 MFC set to  0.000000
6/7/2011	12:08:39 PM	BCl3 MFC set to  0.000000
6/7/2011	12:08:39 PM	PHl3 MFC set to  0.000000
6/7/2011	12:08:39 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:08:39 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:08:39 PM	Tube furnace set to 0
6/7/2011	12:09:39 PM	Helium valve closed
6/7/2011	12:09:39 PM	H2 valve closed
6/7/2011	12:09:39 PM	BCl3 valve closed
6/7/2011	12:09:39 PM	PH3 valve closed
6/7/2011	12:09:39 PM	SiCl4 pre valve closed
6/7/2011	12:09:39 PM	SiCl4 post valve closed
6/7/2011	12:09:39 PM	Bubbler valve closed
6/7/2011	12:09:39 PM	Main Vac valve opened
6/7/2011	12:09:39 PM	Bypass valve opened
6/7/2011	12:09:39 PM	Helium MFC set to  0.000000
6/7/2011	12:09:39 PM	H2 MFC set to  0.000000
6/7/2011	12:09:39 PM	BCl3 MFC set to  0.000000
6/7/2011	12:09:39 PM	PHl3 MFC set to  0.000000
6/7/2011	12:09:39 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:09:39 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:09:39 PM	Tube furnace set to 0
6/7/2011	12:10:39 PM	H2 valve closed
6/7/2011	12:10:39 PM	BCl3 valve closed
6/7/2011	12:10:39 PM	PH3 valve closed
6/7/2011	12:10:39 PM	SiCl4 pre valve closed
6/7/2011	12:10:39 PM	SiCl4 post valve closed
6/7/2011	12:10:39 PM	Bubbler valve closed
6/7/2011	12:10:39 PM	Helium valve opened
6/7/2011	12:10:39 PM	Main Vac valve opened
6/7/2011	12:10:39 PM	Bypass valve opened
6/7/2011	12:10:39 PM	Helium MFC set to  100.000000
6/7/2011	12:10:39 PM	H2 MFC set to  0.000000
6/7/2011	12:10:39 PM	BCl3 MFC set to  0.000000
6/7/2011	12:10:39 PM	PHl3 MFC set to  0.000000
6/7/2011	12:10:39 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:10:39 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:10:40 PM	Tube furnace set to 0
6/7/2011	12:11:40 PM	Helium valve closed
6/7/2011	12:11:40 PM	H2 valve closed
6/7/2011	12:11:40 PM	BCl3 valve closed
6/7/2011	12:11:40 PM	PH3 valve closed
6/7/2011	12:11:40 PM	SiCl4 pre valve closed
6/7/2011	12:11:40 PM	SiCl4 post valve closed
6/7/2011	12:11:40 PM	Bubbler valve closed
6/7/2011	12:11:40 PM	Main Vac valve opened
6/7/2011	12:11:40 PM	Bypass valve opened
6/7/2011	12:11:40 PM	Helium MFC set to  0.000000
6/7/2011	12:11:40 PM	H2 MFC set to  0.000000
6/7/2011	12:11:40 PM	BCl3 MFC set to  0.000000
6/7/2011	12:11:40 PM	PHl3 MFC set to  0.000000
6/7/2011	12:11:40 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:11:40 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:11:40 PM	Tube furnace set to 0
6/7/2011	12:12:40 PM	H2 valve closed
6/7/2011	12:12:40 PM	BCl3 valve closed
6/7/2011	12:12:40 PM	PH3 valve closed
6/7/2011	12:12:40 PM	SiCl4 pre valve closed
6/7/2011	12:12:40 PM	SiCl4 post valve closed
6/7/2011	12:12:40 PM	Bubbler valve closed
6/7/2011	12:12:40 PM	Helium valve opened
6/7/2011	12:12:40 PM	Main Vac valve opened
6/7/2011	12:12:40 PM	Bypass valve opened
6/7/2011	12:12:40 PM	Helium MFC set to  100.000000
6/7/2011	12:12:40 PM	H2 MFC set to  0.000000
6/7/2011	12:12:40 PM	BCl3 MFC set to  0.000000
6/7/2011	12:12:40 PM	PHl3 MFC set to  0.000000
6/7/2011	12:12:40 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:12:40 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:12:40 PM	Tube furnace set to 0
6/7/2011	12:13:40 PM	Helium valve closed
6/7/2011	12:13:40 PM	H2 valve closed
6/7/2011	12:13:40 PM	BCl3 valve closed
6/7/2011	12:13:40 PM	PH3 valve closed
6/7/2011	12:13:40 PM	SiCl4 pre valve closed
6/7/2011	12:13:40 PM	SiCl4 post valve closed
6/7/2011	12:13:40 PM	Bubbler valve closed
6/7/2011	12:13:40 PM	Main Vac valve opened
6/7/2011	12:13:40 PM	Bypass valve opened
6/7/2011	12:13:40 PM	Helium MFC set to  0.000000
6/7/2011	12:13:40 PM	H2 MFC set to  0.000000
6/7/2011	12:13:40 PM	BCl3 MFC set to  0.000000
6/7/2011	12:13:40 PM	PHl3 MFC set to  0.000000
6/7/2011	12:13:40 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:13:40 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:13:40 PM	Tube furnace set to 0
6/7/2011	12:14:40 PM	H2 valve closed
6/7/2011	12:14:40 PM	BCl3 valve closed
6/7/2011	12:14:40 PM	PH3 valve closed
6/7/2011	12:14:40 PM	SiCl4 pre valve closed
6/7/2011	12:14:40 PM	SiCl4 post valve closed
6/7/2011	12:14:40 PM	Bubbler valve closed
6/7/2011	12:14:40 PM	Helium valve opened
6/7/2011	12:14:40 PM	Main Vac valve opened
6/7/2011	12:14:40 PM	Bypass valve opened
6/7/2011	12:14:40 PM	Helium MFC set to  100.000000
6/7/2011	12:14:40 PM	H2 MFC set to  0.000000
6/7/2011	12:14:40 PM	BCl3 MFC set to  0.000000
6/7/2011	12:14:40 PM	PHl3 MFC set to  0.000000
6/7/2011	12:14:40 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:14:40 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:14:40 PM	Tube furnace set to 0
6/7/2011	12:15:40 PM	Helium valve closed
6/7/2011	12:15:40 PM	H2 valve closed
6/7/2011	12:15:40 PM	BCl3 valve closed
6/7/2011	12:15:40 PM	PH3 valve closed
6/7/2011	12:15:40 PM	SiCl4 pre valve closed
6/7/2011	12:15:40 PM	SiCl4 post valve closed
6/7/2011	12:15:40 PM	Bubbler valve closed
6/7/2011	12:15:40 PM	Main Vac valve opened
6/7/2011	12:15:40 PM	Bypass valve opened
6/7/2011	12:15:40 PM	Helium MFC set to  0.000000
6/7/2011	12:15:40 PM	H2 MFC set to  0.000000
6/7/2011	12:15:40 PM	BCl3 MFC set to  0.000000
6/7/2011	12:15:40 PM	PHl3 MFC set to  0.000000
6/7/2011	12:15:40 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:15:40 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:15:41 PM	Tube furnace set to 0
6/7/2011	12:16:41 PM	H2 valve closed
6/7/2011	12:16:41 PM	BCl3 valve closed
6/7/2011	12:16:41 PM	PH3 valve closed
6/7/2011	12:16:41 PM	SiCl4 pre valve closed
6/7/2011	12:16:41 PM	SiCl4 post valve closed
6/7/2011	12:16:41 PM	Bubbler valve closed
6/7/2011	12:16:41 PM	Helium valve opened
6/7/2011	12:16:41 PM	Main Vac valve opened
6/7/2011	12:16:41 PM	Bypass valve opened
6/7/2011	12:16:41 PM	Helium MFC set to  100.000000
6/7/2011	12:16:41 PM	H2 MFC set to  0.000000
6/7/2011	12:16:41 PM	BCl3 MFC set to  0.000000
6/7/2011	12:16:41 PM	PHl3 MFC set to  0.000000
6/7/2011	12:16:41 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:16:41 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:16:41 PM	Tube furnace set to 0
6/7/2011	12:17:41 PM	Helium valve closed
6/7/2011	12:17:41 PM	H2 valve closed
6/7/2011	12:17:41 PM	BCl3 valve closed
6/7/2011	12:17:41 PM	PH3 valve closed
6/7/2011	12:17:41 PM	SiCl4 pre valve closed
6/7/2011	12:17:41 PM	SiCl4 post valve closed
6/7/2011	12:17:41 PM	Bubbler valve closed
6/7/2011	12:17:41 PM	Main Vac valve opened
6/7/2011	12:17:41 PM	Bypass valve opened
6/7/2011	12:17:41 PM	Helium MFC set to  0.000000
6/7/2011	12:17:41 PM	H2 MFC set to  0.000000
6/7/2011	12:17:41 PM	BCl3 MFC set to  0.000000
6/7/2011	12:17:41 PM	PHl3 MFC set to  0.000000
6/7/2011	12:17:41 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:17:41 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:17:41 PM	Tube furnace set to 0
6/7/2011	12:18:41 PM	H2 valve closed
6/7/2011	12:18:41 PM	BCl3 valve closed
6/7/2011	12:18:41 PM	PH3 valve closed
6/7/2011	12:18:41 PM	SiCl4 pre valve closed
6/7/2011	12:18:41 PM	SiCl4 post valve closed
6/7/2011	12:18:41 PM	Bubbler valve closed
6/7/2011	12:18:41 PM	Helium valve opened
6/7/2011	12:18:41 PM	Main Vac valve opened
6/7/2011	12:18:41 PM	Bypass valve opened
6/7/2011	12:18:41 PM	Helium MFC set to  100.000000
6/7/2011	12:18:41 PM	H2 MFC set to  0.000000
6/7/2011	12:18:41 PM	BCl3 MFC set to  0.000000
6/7/2011	12:18:41 PM	PHl3 MFC set to  0.000000
6/7/2011	12:18:41 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:18:41 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:18:41 PM	Tube furnace set to 0
6/7/2011	12:19:41 PM	Helium valve closed
6/7/2011	12:19:41 PM	H2 valve closed
6/7/2011	12:19:41 PM	BCl3 valve closed
6/7/2011	12:19:41 PM	PH3 valve closed
6/7/2011	12:19:41 PM	SiCl4 pre valve closed
6/7/2011	12:19:41 PM	SiCl4 post valve closed
6/7/2011	12:19:41 PM	Bubbler valve closed
6/7/2011	12:19:41 PM	Main Vac valve opened
6/7/2011	12:19:41 PM	Bypass valve opened
6/7/2011	12:19:41 PM	Helium MFC set to  0.000000
6/7/2011	12:19:41 PM	H2 MFC set to  0.000000
6/7/2011	12:19:41 PM	BCl3 MFC set to  0.000000
6/7/2011	12:19:41 PM	PHl3 MFC set to  0.000000
6/7/2011	12:19:41 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:19:41 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:19:41 PM	Tube furnace set to 0
6/7/2011	12:20:42 PM	H2 valve closed
6/7/2011	12:20:42 PM	BCl3 valve closed
6/7/2011	12:20:42 PM	PH3 valve closed
6/7/2011	12:20:42 PM	SiCl4 pre valve closed
6/7/2011	12:20:42 PM	SiCl4 post valve closed
6/7/2011	12:20:42 PM	Bubbler valve closed
6/7/2011	12:20:42 PM	Helium valve opened
6/7/2011	12:20:42 PM	Main Vac valve opened
6/7/2011	12:20:42 PM	Bypass valve opened
6/7/2011	12:20:42 PM	Helium MFC set to  100.000000
6/7/2011	12:20:42 PM	H2 MFC set to  0.000000
6/7/2011	12:20:42 PM	BCl3 MFC set to  0.000000
6/7/2011	12:20:42 PM	PHl3 MFC set to  0.000000
6/7/2011	12:20:42 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:20:42 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:20:42 PM	Tube furnace set to 0
6/7/2011	12:21:42 PM	Helium valve closed
6/7/2011	12:21:42 PM	H2 valve closed
6/7/2011	12:21:42 PM	BCl3 valve closed
6/7/2011	12:21:42 PM	PH3 valve closed
6/7/2011	12:21:42 PM	SiCl4 pre valve closed
6/7/2011	12:21:42 PM	SiCl4 post valve closed
6/7/2011	12:21:42 PM	Bubbler valve closed
6/7/2011	12:21:42 PM	Main Vac valve opened
6/7/2011	12:21:42 PM	Bypass valve opened
6/7/2011	12:21:42 PM	Helium MFC set to  0.000000
6/7/2011	12:21:42 PM	H2 MFC set to  0.000000
6/7/2011	12:21:42 PM	BCl3 MFC set to  0.000000
6/7/2011	12:21:42 PM	PHl3 MFC set to  0.000000
6/7/2011	12:21:42 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:21:42 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:21:42 PM	Tube furnace set to 0
6/7/2011	12:22:42 PM	H2 valve closed
6/7/2011	12:22:42 PM	BCl3 valve closed
6/7/2011	12:22:42 PM	PH3 valve closed
6/7/2011	12:22:42 PM	SiCl4 pre valve closed
6/7/2011	12:22:42 PM	SiCl4 post valve closed
6/7/2011	12:22:42 PM	Bubbler valve closed
6/7/2011	12:22:42 PM	Helium valve opened
6/7/2011	12:22:42 PM	Main Vac valve opened
6/7/2011	12:22:42 PM	Bypass valve opened
6/7/2011	12:22:42 PM	Helium MFC set to  100.000000
6/7/2011	12:22:42 PM	H2 MFC set to  0.000000
6/7/2011	12:22:42 PM	BCl3 MFC set to  0.000000
6/7/2011	12:22:42 PM	PHl3 MFC set to  0.000000
6/7/2011	12:22:42 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:22:42 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:22:42 PM	Tube furnace set to 0
6/7/2011	12:23:42 PM	Helium valve closed
6/7/2011	12:23:42 PM	H2 valve closed
6/7/2011	12:23:42 PM	BCl3 valve closed
6/7/2011	12:23:42 PM	PH3 valve closed
6/7/2011	12:23:42 PM	SiCl4 pre valve closed
6/7/2011	12:23:42 PM	SiCl4 post valve closed
6/7/2011	12:23:42 PM	Bubbler valve closed
6/7/2011	12:23:42 PM	Main Vac valve opened
6/7/2011	12:23:42 PM	Bypass valve opened
6/7/2011	12:23:42 PM	Helium MFC set to  0.000000
6/7/2011	12:23:42 PM	H2 MFC set to  0.000000
6/7/2011	12:23:42 PM	BCl3 MFC set to  0.000000
6/7/2011	12:23:42 PM	PHl3 MFC set to  0.000000
6/7/2011	12:23:42 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:23:42 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:23:42 PM	Tube furnace set to 0
6/7/2011	12:23:43 PM	Run finished at 12:23 PM
6/7/2011	12:23:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/7/2011	12:56:02 PM	Helium MFC set to  100.000000
6/7/2011	12:56:02 PM	Helium valve opened
6/7/2011	12:56:40 PM	Helium valve closed
6/7/2011	12:57:19 PM	Helium valve opened
6/7/2011	12:57:53 PM	Helium valve closed
6/7/2011	12:59:09 PM	Recipe started at 12:59 PM
6/7/2011	12:59:09 PM	Helium valve closed
6/7/2011	12:59:09 PM	BCl3 valve closed
6/7/2011	12:59:09 PM	PH3 valve closed
6/7/2011	12:59:09 PM	SiCl4 pre valve closed
6/7/2011	12:59:09 PM	SiCl4 post valve closed
6/7/2011	12:59:09 PM	Main Vac valve closed
6/7/2011	12:59:09 PM	Bypass valve closed
6/7/2011	12:59:09 PM	Bubbler valve closed
6/7/2011	12:59:09 PM	H2 valve opened
6/7/2011	12:59:09 PM	Helium MFC set to  0.000000
6/7/2011	12:59:09 PM	H2 MFC set to  500.000000
6/7/2011	12:59:09 PM	BCl3 MFC set to  0.000000
6/7/2011	12:59:09 PM	PHl3 MFC set to  0.000000
6/7/2011	12:59:09 PM	SiCl4 MFC set to  0.000000
6/7/2011	12:59:09 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	12:59:10 PM	Tube furnace set to 0
6/7/2011	1:00:30 PM	Helium valve closed
6/7/2011	1:00:30 PM	BCl3 valve closed
6/7/2011	1:00:30 PM	PH3 valve closed
6/7/2011	1:00:30 PM	SiCl4 pre valve closed
6/7/2011	1:00:30 PM	SiCl4 post valve closed
6/7/2011	1:00:30 PM	Main Vac valve closed
6/7/2011	1:00:30 PM	Bypass valve closed
6/7/2011	1:00:30 PM	H2 valve opened
6/7/2011	1:00:30 PM	Bubbler valve opened
6/7/2011	1:00:30 PM	Helium MFC set to  0.000000
6/7/2011	1:00:30 PM	H2 MFC set to  500.000000
6/7/2011	1:00:30 PM	BCl3 MFC set to  0.000000
6/7/2011	1:00:30 PM	PHl3 MFC set to  0.000000
6/7/2011	1:00:30 PM	SiCl4 MFC set to  0.000000
6/7/2011	1:00:30 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	1:00:31 PM	Tube furnace set to 1000
6/7/2011	1:20:31 PM	Helium valve closed
6/7/2011	1:20:31 PM	PH3 valve closed
6/7/2011	1:20:31 PM	Main Vac valve closed
6/7/2011	1:20:31 PM	Bypass valve closed
6/7/2011	1:20:31 PM	H2 valve opened
6/7/2011	1:20:31 PM	BCl3 valve opened
6/7/2011	1:20:31 PM	SiCl4 pre valve opened
6/7/2011	1:20:31 PM	SiCl4 post valve opened
6/7/2011	1:20:31 PM	Bubbler valve opened
6/7/2011	1:20:31 PM	Helium MFC set to  0.000000
6/7/2011	1:20:31 PM	H2 MFC set to  500.000000
6/7/2011	1:20:31 PM	BCl3 MFC set to  3.000000
6/7/2011	1:20:31 PM	PHl3 MFC set to  0.000000
6/7/2011	1:20:31 PM	SiCl4 MFC set to  50.000000
6/7/2011	1:20:31 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	1:20:31 PM	Tube furnace set to 1000
6/7/2011	1:35:31 PM	H2 valve closed
6/7/2011	1:35:31 PM	BCl3 valve closed
6/7/2011	1:35:31 PM	PH3 valve closed
6/7/2011	1:35:31 PM	SiCl4 pre valve closed
6/7/2011	1:35:31 PM	SiCl4 post valve closed
6/7/2011	1:35:31 PM	Main Vac valve closed
6/7/2011	1:35:31 PM	Bypass valve closed
6/7/2011	1:35:31 PM	Helium valve opened
6/7/2011	1:35:31 PM	Bubbler valve opened
6/7/2011	1:35:31 PM	Helium MFC set to  500.000000
6/7/2011	1:35:31 PM	H2 MFC set to  0.000000
6/7/2011	1:35:31 PM	BCl3 MFC set to  0.000000
6/7/2011	1:35:31 PM	PHl3 MFC set to  0.000000
6/7/2011	1:35:31 PM	SiCl4 MFC set to  0.000000
6/7/2011	1:35:31 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	1:35:31 PM	Tube furnace set to 0
6/7/2011	1:55:31 PM	Helium valve closed
6/7/2011	1:55:31 PM	H2 valve closed
6/7/2011	1:55:31 PM	BCl3 valve closed
6/7/2011	1:55:31 PM	PH3 valve closed
6/7/2011	1:55:31 PM	SiCl4 pre valve closed
6/7/2011	1:55:31 PM	SiCl4 post valve closed
6/7/2011	1:55:31 PM	Main Vac valve closed
6/7/2011	1:55:31 PM	Bypass valve closed
6/7/2011	1:55:31 PM	Bubbler valve closed
6/7/2011	1:55:31 PM	Helium MFC set to  0.000000
6/7/2011	1:55:31 PM	H2 MFC set to  0.000000
6/7/2011	1:55:31 PM	BCl3 MFC set to  0.000000
6/7/2011	1:55:31 PM	PHl3 MFC set to  0.000000
6/7/2011	1:55:31 PM	SiCl4 MFC set to  0.000000
6/7/2011	1:55:31 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	1:55:31 PM	Tube furnace set to 0
6/7/2011	1:55:31 PM	Run finished at 1:55 PM
6/7/2011	2:04:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/7/2011	2:04:49 PM	Recipe started at 2:04 PM
6/7/2011	2:04:49 PM	Helium valve closed
6/7/2011	2:04:49 PM	H2 valve closed
6/7/2011	2:04:49 PM	BCl3 valve closed
6/7/2011	2:04:49 PM	PH3 valve closed
6/7/2011	2:04:49 PM	SiCl4 pre valve closed
6/7/2011	2:04:49 PM	SiCl4 post valve closed
6/7/2011	2:04:49 PM	Main Vac valve closed
6/7/2011	2:04:49 PM	Bubbler valve closed
6/7/2011	2:04:49 PM	Bypass valve opened
6/7/2011	2:04:49 PM	Helium MFC set to  0.000000
6/7/2011	2:04:49 PM	H2 MFC set to  0.000000
6/7/2011	2:04:49 PM	BCl3 MFC set to  0.000000
6/7/2011	2:04:49 PM	PHl3 MFC set to  0.000000
6/7/2011	2:04:49 PM	SiCl4 MFC set to  0.000000
6/7/2011	2:04:49 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	2:04:50 PM	Tube furnace set to 0
6/7/2011	2:05:22 PM	Helium valve closed
6/7/2011	2:05:22 PM	H2 valve closed
6/7/2011	2:05:22 PM	BCl3 valve closed
6/7/2011	2:05:22 PM	PH3 valve closed
6/7/2011	2:05:22 PM	SiCl4 pre valve closed
6/7/2011	2:05:22 PM	SiCl4 post valve closed
6/7/2011	2:05:22 PM	Bubbler valve closed
6/7/2011	2:05:22 PM	Main Vac valve opened
6/7/2011	2:05:22 PM	Bypass valve opened
6/7/2011	2:05:22 PM	Helium MFC set to  0.000000
6/7/2011	2:05:22 PM	H2 MFC set to  0.000000
6/7/2011	2:05:22 PM	BCl3 MFC set to  0.000000
6/7/2011	2:05:22 PM	PHl3 MFC set to  0.000000
6/7/2011	2:05:22 PM	SiCl4 MFC set to  0.000000
6/7/2011	2:05:22 PM	Bypass solenoid MFC set to  0.000000
6/7/2011	2:05:23 PM	Tube furnace set to 0
6/7/2011	2:05:23 PM	Run finished at 2:05 PM
6/7/2011	2:05:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
